MEMS piezoelectric device and corresponding manufacturing process

ABSTRACT

A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

PRIORITY CLAIM

This application claims priority from Italian Application for Patent No.102015000087710 filed Dec. 24, 2015, the disclosure of which isincorporated by reference.

TECHNICAL FIELD

The present invention relates to a MEMS (Micro-ElectromechanicalSystems) piezoelectric device and to a corresponding manufacturingprocess.

The following discussion will make particular reference to use of theMEMS piezoelectric device as an energy micro-generator forenergy-harvesting (or energy-scavenging) applications.

BACKGROUND

As it is known, systems for harvesting energy from mechanical orenvironmental energy sources arouse considerable interest in a widerange of technological fields, for example in the field of portable ormobile electronic apparatuses.

Typically, energy-harvesting systems are designed to harvest and storeenergy generated by mechanical or environmental sources and to transferit to a generic load of an electrical type, which may be supplied, or,in the case of an electric battery, recharged. Such systems may, forexample, allow to provide portable electronic apparatuses withoutbatteries or to considerably increase the lifetime of batteries of suchportable electronic apparatuses.

In particular, an energy-harvesting solution that has been proposedenvisages use of a MEMS piezoelectric device capable of converting intoelectrical energy the energy associated to mechanical vibrations(originating from the environment in which the device is operating orfrom bodies, with which the device is in contact).

The simplest solution of a MEMS piezoelectric device envisages use of acantilever structure, which carries at a free end an inertial mass, or“proof mass”; an appropriate piezoelectric material, such as for examplePZT (lead zirconate titanate), is placed on the cantilever beam.

In this above solution, mechanical vibrations cause movement of theproof mass and generation of kinetic energy, which is converted intopotential elastic energy in the form of mechanical deformation of thecantilever beam and of the associated piezoelectric material.

In particular, the resulting oscillation of the cantilever beam causestensile and compressive effects in the piezoelectric material and theresulting generation of an electric charge that may be detected atelectrodes arranged in contact with the piezoelectric material. In otherwords, part of the potential elastic energy stored in the cantileverbeam is converted into electrical energy.

The above solution has an important disadvantage linked to a very narrowoperating frequency band in so far as the cantilever structures aregenerally designed for having a high quality factor Q. Even slightdeviations from the natural resonance frequency of the mechanicalstructure thus cause a sharp decay of the energy that may be harvested.

However, mechanical vibrations in the environment generally have a widefrequency spectrum, with non-controllable values. It follows that thesolution described previously is not typically capable of offering anadequate efficiency in terms of energy harvesting.

To overcome the above drawback, a further solution that has beenproposed envisages use of a so-called “doubly clamped” structure,configured to generate stresses that are predominantly of a tensile typeon corresponding piezoelectric elements. These devices show a behaviordominated by linear bending in the high-frequency region and with lowoscillation amplitudes, and by markedly non-linear stretching in thelow-frequency region and with high oscillation amplitudes.

As illustrated schematically in FIG. 1A, this solution envisages use ofa pair of thin cantilever elements 1 a, 1 b, i.e. ones having athickness t along a vertical axis z much lower than a corresponding mainextension (or length) along a first horizontal axis x. The cantileverelements 1 a, 1 b are constrained at a first end to a fixed structure 2,and at a second end to a proof mass 4, which is directly coupled to thecantilever elements 1 a, 1 b and arranged centrally with respect to thesame cantilever elements 1 a, 1 b.

In particular, D1 and D2 in FIG. 1A designate the main extension of theproof mass 4 and the total extension of the structure (given by the sumof the lengths of the cantilever elements 1 a, 1 b and of the proof mass4), along the first horizontal axis x.

As illustrated in FIG. 1B, a displacement δ along the vertical axis z ofthe proof mass 4 as a result of the mechanical vibrations causes tensilestresses of deformation on both of the cantilever elements 1 a, 1 b. Inparticular, the fact that the proof mass 4 is arranged at the centerprevents lateral movements or rotations of the proof mass 4 and enablesreduction of the natural oscillation frequency to values of hundreds ofHertz, which practically correspond to the typical values of thespectrum of environmental mechanical vibrations.

An example of MEMS piezoelectric device, in particular anenergy-harvesting generator, that uses the doubly clamped solutiondiscussed previously, is described in the document: Hajati Arman,Sang-Gook Kim, “Ultra-wide Bandwidth Piezoelectric Energy Harvesting”Applied Physics Letters 99.8 (2011): 083105, 2011 American Institute ofPhysics (incorporated by reference).

In brief, and as illustrated in FIG. 2A, the micromechanical structureof the MEMS piezoelectric device described in the above document anddesignated by 10 comprises a supporting body 11, of semiconductormaterial, in particular silicon, in which a cavity 12 is provided. Amembrane 13 is arranged over the cavity 12 and carries at the center aninner proof mass 14, directly coupled to the membrane 13.

The inner proof mass 14 defines in the membrane 13, laterally withrespect to the same proof mass 14, a first cantilever element 15 a and asecond cantilever element 15 b, on which an appropriate piezoelectricmaterial element 16, for example PZT, is placed, contacted by electrodes17.

During the manufacturing process, the etching leading to formation ofthe cavity 12 also defines the geometry of the inner proof mass 14 andthe dimensions of the cantilever elements 15 a, 15 b, which are thusdetermined directly by the size of the same inner proof mass 14.

In particular, once again D1 and D2 designate in FIG. 2A the extensionof the inner proof mass 14 and, respectively, the main overall extensionof the cantilever elements 15 a, 15 b and of the aforesaid inner proofmass 14.

The micromechanical structure 10 further comprises an outer proof mass18, having an extension substantially corresponding to the aforesaiddimension D2, coupled, for example using bonding techniques, onto themembrane 13.

During operation, in the presence of environmental vibrations, thecantilever elements 15 a, 15 b undergo deformation as a result of thejoint displacement of the inner and outer proof masses 14, 18, thusgenerating a corresponding electrical signal at the electrodes 17.

As illustrated in FIG. 2B (where, for reasons of simplicity, the outerproof masses 18 are not illustrated), a plurality of micromechanicalstructures 10 of the type described previously may advantageously beobtained starting from a same supporting body 11, in order to increaseefficiency of generation of electrical energy.

It is noted that the solution described previously is, however, affectedby certain important limitations. In particular, the electricalperformance depends upon the geometry of the resulting proof mass.

However, it is not possible to increase the dimensions of the innerproof mass 14 beyond a certain threshold in so far as, in this case, thedimensions of the cantilever elements 15 a, 15 b (and of thecorresponding piezoelectric material elements 16) would be excessivelyreduced; typically, in the micromechanical structure 10, dimension D1may at the most be equal to one third of dimension D2.

Introduction of the outer proof mass 18 is consequently required toincrease the performance of energy generation, starting from thedetected mechanical vibrations.

However, coupling of this outer proof mass 18 complicates themanufacturing process (requiring in fact coupling between two distinctwafers of semiconductor material, the so-called “wafer-to-waferbonding”) and leads to a non-negligible possibility of defectivenessfollowing upon dicing of the same wafers.

Furthermore, the geometry of the piezoelectric structure is in this casefixed, being of the doubly clamped type based on the tensile deformationmodes of the piezoelectric material, thus limiting the possibilities indesigning the characteristics of the micromechanical structure.

There is accordingly a need in the art to overcome, at least in part,the problems that afflict MEMS piezoelectric devices of a known type,and in particular to provide a more efficient solution for harvesting ofenvironmental energy.

SUMMARY

In an embodiment, a MEMS piezoelectric device comprises: a monolithicbody of semiconductor material having a first main surface and a secondmain surface, the first and second main surfaces extending parallel to ahorizontal plane formed by a first horizontal axis and a secondhorizontal axis, the first and second main surfaces further beingopposite to one another along a vertical axis; a housing cavity withinsaid monolithic body; a membrane suspended above said housing cavity atthe first main surface of said monolithic body; a piezoelectric materiallayer above a first surface of said membrane; an electrode arrangementin contact with the piezoelectric material layer; and a proof masscoupled to a second surface of the membrane, said second surfaceopposite to the first surface along the vertical axis, said proof massconfigured to cause deformation of the membrane in response tomechanical vibrations, wherein said proof mass is coupled to saidmembrane by a connection element located in a central position betweensaid membrane and said proof mass in the direction of said verticalaxis.

In an embodiment, a process for manufacturing a MEMS piezoelectricdevice comprises: forming a membrane at a first main surface of wafer ofsemiconductor material further having a second main surface, the firstand second main surfaces extending parallel to a horizontal plane formedby a first horizontal axis and a second horizontal axis, the first andsecond main surfaces further being opposite to one another along avertical axis; forming a housing cavity within said wafer so that saidmembrane is suspended above said housing cavity; forming a piezoelectricmaterial layer above a first surface of said membrane (23); forming anelectrode arrangement in contact with the piezoelectric material layer(30); and forming a proof mass coupled to a second surface of themembrane, said second surface opposite to the first surface along thevertical axis, said proof mass configured to deform the membrane inresponse to environmental mechanical vibrations, wherein forming theproof mass comprises forming said proof mass so that the proof mass iscoupled to said membrane by a connection element arranged in a centralposition between said membrane and said proof mass in the direction ofsaid vertical axis.

In an embodiment, a MEMS piezoelectric device comprises: a body ofsemiconductor material having a first main surface and a second mainsurface, the first and second main surfaces extending parallel to ahorizontal plane, the first and second main surfaces further beingopposite to one another along a vertical axis perpendicular to saidhorizontal plane; an opening in the second main surface which defines,from said body of semiconductor material, a membrane portion ofsemiconductor material, a proof mass of semiconductor material and acolumn of semiconductor material, said column of semiconductor materialcoupling said proof mass of semiconductor material to a bottom surfaceof said membrane portion of semiconductor material; a piezoelectricmaterial layer above an upper surface of said membrane portion ofsemiconductor material, said lower and upper surfaces being opposite toone another along the vertical axis; and an electrode arrangement incontact with the piezoelectric material layer.

BRIEF DESCRIPTION OF THE DRAWINGS

For a better understanding of the present invention, preferredembodiments thereof are now described, purely by way of non-limitingexample and with reference to the attached drawings, wherein:

FIGS. 1A and 1B are schematic cross-sectional views of a MEMSpiezoelectric structure, in different operating conditions;

FIG. 2A is a schematic cross-sectional view of a portion of amicromechanical structure of a MEMS piezoelectric device of a knowntype;

FIG. 2B is a top schematic perspective view of the micromechanicalstructure of FIG. 2A;

FIG. 3A is a cross-sectional view of a micromechanical structure of aMEMS piezoelectric device according to an embodiment of the presentsolution;

FIG. 3B is a schematic top perspective view of the micromechanicalstructure of FIG. 3A;

FIG. 4 is a schematic cross-sectional view of a portion of themicromechanical structure of FIG. 3A;

FIGS. 5, 6A-6B, 7, 8A-8C, 9-14 and 15 are schematic cross-sectionalviews, or schematic plan views, of the micromechanical structure of FIG.3A in successive steps of a corresponding manufacturing process;

FIGS. 16 and 17A are schematic top perspective views regarding differentembodiments of the micromechanical structure;

FIG. 17B is a schematic bottom perspective view of the micromechanicalstructure of FIG. 17A;

FIGS. 18 and 19 are schematic plan views of further embodiments of themicromechanical structure;

FIG. 20 is a block diagram of a system for harvesting electrical energythat uses the MEMS piezoelectric device as a energy micro-generator; and

FIG. 21 shows a portable electronic apparatus in which theelectrical-energy-harvesting system of FIG. 20 may be used.

DETAILED DESCRIPTION

As shown in FIGS. 3A and 3B, a MEMS piezoelectric device 20 comprises amonolithic body 21 of semiconductor material, in particular silicon,having a front surface 21 a and a rear surface 21 b that lie in ahorizontal plane xy defined by a first horizontal axis x and by a secondhorizontal axis y.

The monolithic body 21 has at the center a housing cavity 22, whichextends from the rear surface 21 b as far as a membrane 23, which issuspended over the housing cavity 22 at the front surface 21 a of themonolithic body 21; in plan view, the membrane 23 and the underlyinghousing cavity 22 may, for example, have a circular, square,rectangular, or generically polygonal shape.

The MEMS piezoelectric device 20 further comprises a proof mass 24,arranged within the housing cavity 22 and coupled to the membrane 23 bya connection, or support, element 25. This connection element 25 isarranged between a top surface 24 a of the proof mass 24 and a bottomsurface 23 b of the membrane 23, which faces the top surface 24 a.

In one embodiment, the connection element 25 has a column configurationand is connected to the membrane 23 at a geometrical center thereof.

The housing cavity 22 surrounds the proof mass 24 laterally (along thefirst and second horizontal axes x, y) and at the top (a portion of thehousing cavity 22 is in fact arranged between the front surface 24 a ofthe proof mass 24 and the membrane 23); the proof mass 24 has a rearsurface 24 b arranged, in the embodiment illustrated, at the same levelas the rear surface 21 b of the monolithic body 21.

In particular (see also the schematic representation of FIG. 4), D1 onceagain designates a lateral extension of the proof mass 24 (parallel tothe front surface 21 a of the monolithic body 21 in the horizontal planexy, for example along the first horizontal axis x), and D2 designates acorresponding main extension of the membrane 23 along the same firsthorizontal axis x.

According to one aspect, as is evident from examination of FIG. 3A andalso of FIG. 4, sizing of the proof mass 24 is in this case independentof sizing of the membrane 23 (the same membrane designed, as describedhereinafter, to carry piezoelectric elements for detectingdeformations). The dimension D1 may in this case even advantageously beapproximately equal to the dimension D2.

Furthermore, a corresponding dimension of the connection element 25 (inthis case, along the first horizontal axis x), designated by D3, issmaller than the dimension D1 of the proof mass 24 (for instance, muchsmaller, in the example illustrated). In other words, only a centralportion of the proof mass 24, with extension much shorter than theentire lateral extension D1 of the proof mass 24 along the firsthorizontal axis x, is connected to the membrane 23 via the connectionelement 25.

The MEMS piezoelectric device 20 further comprises, on the front surface21 a of the monolithic body 21 and in general above the membrane 23: afirst dielectric layer 27, for example an oxide layer, arranged on thefront surface 21 a of the monolithic body 21; a service layer 28, forexample a polysilicon layer, the function of which will be clarifiedhereinafter with reference to the manufacturing process (see FIG. 10); asecond dielectric layer 29, which is also, for example, an oxide layer,arranged above the service layer 28 and the first dielectric layer 27; apiezoelectric material layer 30, for example PZT, arranged on the seconddielectric layer 29, vertically in an area corresponding to the membrane23; an electrode arrangement 32, arranged on, and in contact with, thepiezoelectric material layer 30; in particular, the electrodearrangement 32 comprises at least one first set of electrodes 33 a andone second set of electrodes 33 b, which are arranged above the membrane23, on opposite sides with respect to the connection element 25 in thehorizontal plane xy, for example on opposite sides along the firsthorizontal axis x, and are designed to enable detection of thedeformations of the same membrane 23; a passivation layer 35, forexample of silicon oxide or silicon nitride, arranged on the electrodearrangement 32, the piezoelectric material layer 30, and the seconddielectric layer 29; and electrical contact elements 36 (the so-called“vias”), which are arranged on the passivation layer 35, and furtherextend, at least in part, through the same passivation layer 35, forelectrically contacting the electrode arrangement 32 and in particularthe first and second sets of electrodes 33 a, 33 b, and in this wayenable detection of an electrical signal and execution (as describedmore fully hereinafter), for example, of energy-harvesting operations.

During operation, the proof mass 24 displaces in response to mechanicalvibrations, thus causing deformation of the membrane 23 and of theassociated layer of piezoelectric material 30. This deformation isdetected by the first and second sets of electrodes 33 a, 33 b, whichsupply, through the electrical contacts 36, respective electricalsignals for generation of electrical energy starting from the aforesaidvibrations.

As illustrated in FIG. 3B, a release opening 38 may be provided,laterally to the membrane 23 and the proof mass 24, in the examplehaving opening portions extending along the first horizontal axis x andarranged laterally to the proof mass 24 with respect to the horizontalaxis y. As will be discussed more fully hereinafter, this releaseopening 38 defines the mode of constraint of the membrane 23 to themonolithic body 21, in the example being of the doubly clamped type(given that the membrane 23 is coupled to the monolithic body 21 at twosides thereof that extend along the second horizontal axis y).

Furthermore, in a way not illustrated herein (but that will be evidentto a person skilled in the field), a supporting body may be coupledunderneath the monolithic body 21, at the rear surface 21 b, withsupporting functions (the supporting body having in this case anappropriate cavity in fluid communication with the housing cavity 22 forproviding freedom of movement for the proof mass 24).

A description of a possible process for manufacturing the MEMSpiezoelectric device 20 is now provided.

In an initial step of the manufacturing process (see FIG. 5), a wafer 41of semiconductor material is provided, for example of monocrystallinesilicon, comprising a substrate 42, for example of an N type, and havinga front surface 41 a and a rear surface 41 b.

The manufacturing process continues with formation of a buried cavitywithin the wafer 41, with techniques described in detail for example inU.S. Pat. No. 8,173,513 (European Patent 1577656) (incorporated byreference).

In brief, and as illustrated in FIGS. 6A and 6B (which are not drawn toscale, as likewise the remaining figures), on the front surface 41 a ofthe wafer 41 a resist mask 43 is provided. The mask 43 has, inparticular, (see FIG. 6B) an etching area 44, in the exampleapproximately square (but it may also be circular or genericallypolygonal), and comprises a plurality of mask portions 43 a, for examplehexagonal, which define a lattice, for example a honeycomb lattice.

As will emerge clearly hereinafter, the etching area 44 of the mask 43corresponds to the area that will be occupied by the housing cavity 22and has an extension corresponding to the extension of the membrane 23(the lateral extension of the mask 43 is thus substantially equal to thedimension D2, along first horizontal axis x).

The mask 43 has a central portion 43′, for example having a square orcircular or generically polygonal shape in plan view, which correspondsto the positioning of the connection element 25, which in the examplealso has a square or circular or generically polygonal shape in planview. In particular, the lateral extension of the central portion 43′ ofthe mask 43 determines the extension D3 of the connection element 25,along first horizontal axis x.

Furthermore, the mask 43 has a lateral prolongation 45, which isarranged at a central axis of the same mask 43 and extends, in theexample, along the second horizontal axis y.

Then (see FIG. 7, which, as FIG. 6A, represents only a small portion ofthe wafer 41 at an enlarged scale, for reasons of clarity ofillustration), using mask 43, an anisotropic chemical etching of thesubstrate 42 is performed, following upon which trenches 46 are formed,which communicate with one another and delimit a plurality of siliconcolumns 47. In practice, trenches 46 form an open region of a complexshape (corresponding to the lattice of the mask 43) in which the columns47 (having a shape corresponding to the mask portions 43 a) extend.

Next (see FIG. 8A, which represents a more extensive portion of thewafer 41, as compared to FIGS. 6a and 7), the mask 43 is removed, and anepitaxial growth is carried out in deoxidizing environment (typically,in atmosphere with high concentration of hydrogen, preferably withtrichlorosilane —SiHCl₃). Consequently, an epitaxial layer 48 (appearingonly in FIG. 8A and hereinafter not distinguished from the substrate 42)grows on the columns 47 and closes at the top the aforesaid open regionformed by the trenches 46.

A thermal annealing step is then carried out, for example for 30 min at1190° C., preferably in a reducing atmosphere, typically a hydrogenatmosphere.

The annealing step causes migration of the silicon atoms, which tend tomove into a position of lower energy. Consequently, and also thanks tothe short distance between the columns 47, the silicon atoms migratecompletely from the portions of the columns 47 present within theaforesaid region formed by the trenches 46, and a buried cavity 50 isformed, starting from the same region.

On the buried cavity 50 a thin silicon layer remains, constituted inpart by silicon atoms grown epitaxially and in part by migrated siliconatoms, which forms the membrane 23, which is flexible and may deflect inthe presence of external stresses.

During the same step of the manufacturing process, the connectionelement 25 is defined within the buried cavity 50, which extends inparticular at the center with respect to the membrane 23, between a topinner surface 50 a and a bottom inner surface 50 b of the buried cavity50.

Furthermore, as illustrated in the different cross-section of FIG. 8Band in the corresponding plan view of FIG. 8C (where the lines ofsection regarding the aforesaid FIGS. 8A and 8B are highlighted), withthe same steps of the manufacturing process a buried channel 51 isprovided, in the region identified by the lateral prolongation 45 of themask 43, communicating with the buried cavity 50, laterally thereto (inthe example, extending along the second horizontal axis y).

An access trench 54 is then formed through a surface portion of thesubstrate 42, to reach the buried channel 51, by means of an etchingperformed from the front of the wafer 41, starting from the frontsurface 41 a.

The manufacturing process then continues (FIG. 9) with a step of thermaloxidation within the buried cavity 50 (performed through access trench54) and on the front surface 41 a of the wafer 41, to form the firstdielectric layer 27, made, for example, of silicon oxide, SiO₂.Following upon this step, in particular, an internal dielectric region55 a is formed, which coats the inner walls of the buried cavity 50 andthe inner walls of the access trench 54.

A step of deposition, for example of polysilicon, is then carried out(FIG. 10), which leads to formation of the service layer 28 on the wafer41 and within the access trench 54, for closing the opening previouslyprovided for the oxidation.

The manufacturing process envisages at this point (FIG. 11) formation ofthe second dielectric layer 29, on the service layer 28, and thenformation, by deposition and subsequent definition, of the piezoelectricmaterial layer 30 on the second dielectric layer 29 (FIG. 12).

In particular, the layer of piezoelectric material 30 may be formedusing the technique known as “sol-gel”, which envisages successive stepsof formation of a colloidal solution (sol), which operates as aprecursor for the subsequent formation of a continuous inorganic latticecontaining an interconnected liquid phase (gel), through reactions ofhydrolysis and condensation. Thermal post-treatments of drying andsolidification are generally used for eliminating the liquid phase fromthe gel, promoting further condensation, contributing to formation ofthe correct crystallographic phase, and enhancing the mechanical and,consequently, piezoelectric properties.

The piezoelectric material layer 30 is hereinafter defined, so as tohave a main lateral extension, along the first horizontal axis x, largerthan the dimension D2 of the entire membrane 23, as illustrated in thesame FIG. 12.

The manufacturing process then continues with deposition, on thepiezoelectric material layer 30, of an electrode layer, for example oftitanium/tungsten (TiW), which is then appropriately shaped, as has beendescribed in detail previously, with reference to FIG. 3A, for theformation of the electrode arrangement 32.

The passivation layer 35 is then deposited on the electrode arrangement32 previously provided, and contact openings are formed (FIG. 13)through the same passivation layer 35 and are subsequently filled with asuitable conductive material, for formation of the electrical contactelements 36.

According to an aspect, see once again FIG. 13, an etch mask 61 is thenformed on the rear surface 41 b of the wafer 41, for etching of thewafer 41 and formation of back trenches 62, reaching the buried cavity50 from the back. In particular, this etching is performed withetch-stop on the dielectric region 55 a, coating a bottom wall of theburied cavity 50.

In this step of the manufacturing process, the extension D1 of the proofmass 25 is determined, according to the positioning and dimensions ofthe back trenches 62. In particular, the back trenches 62 have insectional view an outer side wall vertically in a position correspondingto the perimeter of the buried cavity 50, and an inner side wall, whoseposition defines the aforesaid dimension D1.

It is thus clear that, in the solution described, it is possible to sizein a desired way the proof mass 25, in this step of etching from theback of the wafer 41, in a way distinct and separate from the steps offormation and sizing of the membrane 23 (which have been previouslycarried out).

The manufacturing process continues (FIG. 14) with etching of thedielectric region 55 a within the buried cavity 50, thus definingentirely the housing cavity 22 within the wafer 41.

According to a further aspect, in a final step of the manufacturingprocess, the type of constraint may be defined of the membrane 23 to thewafer 41 (or, in a similar way, to the monolithic body 21 that will beobtained after final dicing of the same wafer 41); in this respect, theproposed solution advantageously offers ample freedom of design foradapting to various needs and applications, for example with thepossibility of obtaining a solution of a doubly clamped type, of acompletely clamped type, or with four points of constraint.

In detail, as illustrated in FIG. 15 (which corresponds to the topperspective view of FIG. 3B, described previously), a further etching ofthe wafer 41 may then be carried out (in this case, the embodiment is ofa doubly clamped type), for example from the back, starting from therear surface 41 b.

This etching, which is carried out through the housing cavity 22,involves an edge portion of the membrane 23 and the layers possiblypresent on the front surface 41 a of the wafer 41, in this case thefirst dielectric layer 27, the service layer 28, and possibly the seconddielectric layer 29.

In particular, the release opening 38 is thus formed, in fluidcommunication with the housing cavity 22, and comprising in this case(once again referring to the embodiment of a doubly clamped type) afirst cavity portion 38 a and a second cavity portion 38 b, which arearranged alongside the membrane 23, on opposite sides with respect tothe second horizontal axis y, and separate the same membrane 23 from thesemiconductor material of the wafer 41.

In this embodiment, the membrane 23 is connected to the wafer 41 at twosides, for example the sides parallel to the first horizontal axis x,and is separated from the wafer 41 itself along the other two sides, inthe example the sides parallel to the second horizontal axis y.

As illustrated in FIG. 16, a different embodiment, which provides afour-point constraint of the membrane 23 to the wafer 41, envisagesproviding, by means of the etching described previously, two furthercavity portions 38 c, 38 d of the release cavity 38, which are arrangedalong the sides of the membrane 23 parallel to the second horizontalaxis y, laterally on opposite sides of the membrane 23 with respect tothe first horizontal axis x.

Accordingly, the membrane 23 is in this case connected and constrainedto the wafer 41 at four vertices thereof (since it has, in the example,a substantially square shape) by connection portions 66 a-66 d thatextend at said vertices, between the membrane 23 and the wafer 41 (asillustrated in the aforesaid FIG. 16).

FIGS. 17A-17B instead show an embodiment with complete constraint, wherethe membrane 23 is connected to the wafer 41 along its entire perimeter(in this case, the last etching step, described previously for formationof the release cavity 38, here not present, may thus not be envisaged).

In any case, the manufacturing process terminates with a step of dicingor sawing of the wafer 41, for definition of the dies, each of whichcomprises the body of semiconductor material 21 and the correspondingpiezoelectric structure.

As illustrated in FIGS. 18 and 19, which refer, merely by way ofexample, to a structure with four points of constraint, a furtherpossibility offered by the present solution regards formation of theelectrode arrangement 32.

In particular, as illustrated in FIG. 18, in a possible embodiment, boththe first set of electrodes 33 a and the second set of electrodes 33 bhave a comb-fingered configuration, i.e., each comprising a first “comb”and a second “comb” of electrodes, electrically contacted by arespective contact element 36 (in this case, the contact elements 36being arranged at the four points of constraint).

Alternatively, as illustrated in FIG. 19, the electrode arrangement 32may be of a circular type. In this case, the first and second sets ofelectrodes 33 a, 33 b comprise a respective plurality of rings ofelectrodes of increasing diameter that depart concentrically from arespective connection element 69 that terminates at a respective contactelement 36 (the contact elements 36 being in this case arranged at twodiametrically opposite points of constraint).

The advantages of the solution described are clear from the foregoingdiscussion.

It is underlined, in any case, that it allows to solve the problemshighlighted previously afflicting the known solutions for MEMSpiezoelectric devices, in particular: using technologies and processesaltogether compatible with MEMS-device technologies; having lowmanufacturing costs and using standard manufacturing processes, with aresulting reduced occupation of area in the integrated implementation(and the possibility of integration with further micromechanicalstructures, or ASICs); offering ample freedom of design of the proofmass 25, which may in particular have dimensions comparable with thecorresponding membrane 23, such as not to require the presence of anadditional outer proof mass (in this way, leading to a further reductionof the complexity of production and a marked decrease in defectivenessand costs); and, in general, guaranteeing improved electricalperformance, in particular as regards the efficiency in generation ofelectrical energy starting from mechanical vibrations.

The aforesaid characteristics render the use of the MEMS piezoelectricdevice 20 particularly advantageous in an electrical-energy-harvestingsystem, for use, for example, in a portable electronic apparatus (suchas a smartphone), for example of the type represented schematically andby functional blocks in FIG. 20.

In particular, the energy-harvesting system, designated as a whole by70, comprises the MEMS piezoelectric device 20, used as transducer forconversion of environmental vibrations into electrical energy, togenerate a transduction signal S_(TRANSD).

The energy-harvesting system 70 further comprises: an electricalharvesting interface 71, configured to receive at its input thetransduction signal S_(TRANSD), appropriately process the same signal,and supply at output a harvesting signal S_(IN); a storage capacitor 72,which is connected to the output of the harvesting interface 71 andreceives the harvesting signal S_(IN), which causes charging thereof andconsequent storage of energy; and a voltage regulator, or converter 74,connected to the storage capacitor 72 for receiving at its input theelectrical energy stored and generating at its output a regulated signalS_(REG), with a suitable value to be supplied to an electric load 75,for its supply or recharging.

As previously mentioned, the energy-harvesting system 70 mayadvantageously be used for electrically supplying an electrical orelectronic apparatus, which may even be without a battery or providedwith a rechargeable battery.

By way of example, FIG. 21 shows an electronic apparatus 76, in theexample of a portable or wearable type, such as a bracelet or a watch,which incorporates the energy-harvesting system 70 for generation ofelectrical energy by exploiting mechanical vibrations, in this caseoriginated by the movement of the body of the user. The electronicapparatus 76 may advantageously be used in the field of fitness.

Finally, it is clear that modifications and variations may be made towhat has been described and illustrated herein, without therebydeparting from the scope of the present invention, as defined in theannexed claims.

In particular, modifications may be made to the shape or dimensions ofone or more of the elements that constitute the MEMS piezoelectricdevice 20; for example, according to the requirements of application anddesign of the MEMS piezoelectric device 20, the central connectionelement 25 may have a different shape or a different extension (in thelimits of the dimensions of the proof mass 24); for example, it may havean extension elongated along the second horizontal axis y, which may besubstantially equal to the corresponding extension of the membrane 23along the same second horizontal axis y.

Furthermore, the micromechanical structure described previously may ingeneral be used in any MEMS device for generating an electrical signalstarting from detected mechanical vibrations, for example, in apiezoelectric accelerometer or in other devices that envisage the use ofa proof mass.

The invention claimed is:
 1. A MEMS piezoelectric device, comprising: amonolithic body of semiconductor material having a first main surfaceand a second main surface, the first and second main surfaces extendingparallel to a horizontal plane formed by a first horizontal axis and asecond horizontal axis, the first and second main surfaces further beingopposite to one another along a vertical axis; a housing cavity withinand at the second main surface of said monolithic body; a membranesuspended above said housing cavity at the first main surface of saidmonolithic body; a piezoelectric material layer above a first surface ofsaid membrane; an electrode arrangement in contact with thepiezoelectric material layer; and a proof mass coupled to a secondsurface of the membrane, said second surface opposite to the firstsurface along the vertical axis, said proof mass configured to causedeformation of the membrane in response to mechanical vibrations,wherein said proof mass is coupled to said membrane by a connectionelement located in a central position between said membrane and saidproof mass in the direction of said vertical axis.
 2. The deviceaccording to claim 1, wherein said housing cavity is positioned betweena first surface of said proof mass that faces said membrane and thesecond surface of said membrane, said housing cavity surrounding saidconnection element laterally in a direction parallel to said horizontalplane.
 3. The device according to claim 1, wherein said connectionelement is a column arranged at a geometrical center of said membrane.4. The device according claim 1, wherein said membrane has an extensionalong the first horizontal axis, and wherein said proof mass has arespective extension along said first horizontal axis approximatelyequal to the extension of said membrane, and said connection element hasa respective extension along said first horizontal axis shorter than therespective extension of said proof mass.
 5. The device according toclaim 1, further comprising a release opening in fluid communicationwith the housing cavity arranged laterally to the membrane andseparating said membrane from said monolithic body at said first mainsurface.
 6. The device according to claim 5, wherein said releaseopening is designed to define a type of constraint of said membrane tosaid monolithic body.
 7. The device according to claim 6, wherein saidtype of constraint is a double constraint, and said release openingcomprises a first opening portion and a second opening portion whichextend laterally to said membrane on opposite sides along said secondhorizontal axis.
 8. The device according to claim 6, wherein said typeof constraint is a four-point constraint, and said release openingfurther comprises a first opening portion and a second opening portionwhich extend laterally to said membrane on opposite sides along saidsecond horizontal axis and a third opening portion and a fourth openingportion which extend laterally to said membrane on opposite sides alongsaid first horizontal axis.
 9. The device according to 1, wherein saidmembrane is completely constrained to said monolithic body being incontact with said monolithic body along an entire perimeter thereof. 10.The device according to claim 1, wherein said electrode arrangementcomprises at least one first set of electrodes and one second set ofelectrodes which are arranged laterally to said connection element andhave a comb-fingered configuration.
 11. The device according to claim 1,wherein said electrode arrangement comprises at least one first set ofelectrodes and one second set of electrodes which are arranged laterallyto said connection element and have a circular configuration.
 12. Thedevice according to claim 1, wherein the piezoelectric material layer isconfigured to transduce mechanical energy associated to mechanicalvibrations into an electrical signal.
 13. The device according to claim1, configured within an electronic apparatus of a portable or mobiletype.
 14. A MEMS piezoelectric device, comprising: a body ofsemiconductor material having a first main surface and a second mainsurface, the first and second main surfaces extending parallel to ahorizontal plane, the first and second main surfaces further beingopposite to one another along a vertical axis perpendicular to saidhorizontal plane; an opening in the second main surface which defines,from said body of semiconductor material, a membrane portion ofsemiconductor material, a proof mass of semiconductor material and acolumn of semiconductor material, said column of semiconductor materialcoupling said proof mass of semiconductor material to a bottom surfaceof said membrane portion of semiconductor material; a piezoelectricmaterial layer above an upper surface of said membrane portion ofsemiconductor material, said lower and upper surfaces being opposite toone another along the vertical axis; and an electrode arrangement incontact with the piezoelectric material layer.
 15. The device of claim14, wherein a first lateral extent of the membrane portion ofsemiconductor material over said horizontal plane is larger than asecond lateral extent of the proof mass of semiconductor material oversaid horizontal plane, and wherein the second lateral extent is largerthan a third lateral extent of the column of semiconductor material oversaid horizontal plane.
 16. The device of claim 14, wherein said columnof semiconductor material is positioned at a geometric center of saidmembrane portion.
 17. The device of claim 14, further comprising arelease opening extending through said membrane portion of semiconductormaterial and in fluid communication with said opening.
 18. The device ofclaim 14, further comprising a first opposed pair of release openingsextending through said membrane portion of semiconductor material onopposite sides of the proof mass of semiconductor material and in fluidcommunication with said opening.
 19. The device of claim 18, furthercomprising a second opposed pair of release openings extending throughsaid membrane portion of semiconductor material on opposite sides of theproof mass of semiconductor material and in fluid communication withsaid opening, said first and second opposed pairs of release openingsextending in perpendicular directions.
 20. The device of claim 14,wherein said electrode arrangement comprises a first set of electrodesand a second set of electrodes which are arranged laterally to saidcolumn of semiconductor material and configured to generate anelectrical signal from transduced mechanical energy associated tomechanical vibrations of the proof mass.
 21. The device of claim 1,wherein the membrane, the proof mass and the connection element areparts of the monolithic body of semiconductor material defined by thehousing cavity.
 22. The device of claim 1, wherein the membrane has athickness in the vertical axis which extends from a first inner surfaceof the housing cavity and the first main surface of the monolithic bodyof semiconductor material.
 23. A MEMS piezoelectric device, comprising:a body of semiconductor material having a first main surface and asecond main surface, the first and second main surfaces extendingparallel to a horizontal plane, the first and second main surfacesfurther being opposite to one another along a vertical axisperpendicular to said horizontal plane; wherein an opening in the secondmain surface of the body of semiconductor material defines a membraneportion of the body of semiconductor material, a proof mass portion ofthe body of semiconductor material and a column portion of the body ofsemiconductor material, said column portion of the body of semiconductormaterial extending between said proof mass portion and a bottom surfaceof said membrane portion; a piezoelectric device mounted to an uppersurface of said membrane portion of the body of semiconductor material,said lower and upper surfaces being opposite to one another along thevertical axis; and an electrode arrangement in contact with thepiezoelectric device.
 24. The device of claim 23, wherein a firstlateral extent of the membrane portion in said horizontal plane islarger than a second lateral extent of the proof mass portion in saidhorizontal plane, and wherein a third lateral extent of the columnportion in said horizontal plane the second lateral extent is smallerthan both the first and second lateral extents.
 25. The device of claim23, wherein said column portion is positioned at a geometric center ofsaid membrane portion.
 26. The device of claim 23, further comprising atleast one release opening extending through said membrane portion and influid communication with said opening.
 27. The device of claim 26,wherein said at least one release opening comprises a first opposed pairof release openings on opposite sides of the proof mass portion.
 28. Thedevice of claim 26, wherein said at least one release opening comprises:a first opposed pair of release openings at first and second oppositesides of the proof mass portion; and a second opposed pair of releaseopenings at third and fourth opposite sides of the proof mass portion.29. The device of claim 28, wherein a larger opening dimension of thefirst opposed pair of release openings extend in a directionperpendicular to a direction of a larger opening dimension of the secondopposed pair of release openings.
 30. The device of claim 23, whereinsaid electrode arrangement comprises a first set of electrodes and asecond set of electrodes which are arranged laterally to said columnportion and configured to generate an electrical signal from transducedmechanical energy associated to mechanical vibrations of the proof massportion.